PLD法による製膜チャンバーの全体像をFig.2-1-1に示した。製膜

PLD法による製膜チャンバーの全体像をFig.2-1-1に示した。製膜を実際に行うのは、Fig.2-1-1の左奥にあるメインチャンバー内である。手前のロードロックは、準備室の役割を果たし、製膜のための単結晶基板やターゲットを実際に出し入れする場所である。メインチャンバー内は10-9 Torrほどの真空状態であるため、ターゲット等をメインチャンバーで直接出し入れせず、仕切られたロードロックで行うことで、メインチャンバーの真空度を保つことができる。右のオレンジ色の箱で、エキシマーレーザーを発振させ、隣の光学架台内の光路を通って、メインチャンバー内のターゲットに照射される。以下では、製膜時のより詳細な話についてメインチャンバー内の様子とともに説明をする。

結果 (英語) 1:

Overview of films by pulsed laser deposition Chamber is shown Fig.2-1-1. Films actually do is located at the left rear of the Fig.2-1-1 in the main Chamber. Lock in the front acts as a preparation room, where deposition for single crystal substrate and target actually transferring. The main Chamber within 10-9 can keep the main Chamber vacuum loadlock as Torr vacuum for the target in the main Chamber directly out, separated by. Right orange box, excimer laser oscillators and, through the light path in the optics mount next to the targets in the main Chamber to be irradiated. Below, made films at more detailed story as well as in the main Chamber about to explain.

結果 (英語) 2:

It showed the overall picture of the film chamber by PLD method Fig.2-1-1. Actually performing the film formation, it is the main chamber to the left back of Fig.2-1-1. In front of the load lock, acts as a preparation room, an actual location and out of the single crystal substrate and the target for film formation. Since the main chamber is a vacuum of about 10-9 Torr, and not out directly targets like in the main chamber, by performing in partitioned by a load lock, it is possible to maintain the degree of vacuum in the main chamber. In the box of right orange, to oscillate the excimer laser passes through the optical path in the neighboring optical mount, and is irradiated to the target in the main chamber. The following is a description in conjunction with state of the main chamber for more detailed stories during the film.

結果 (英語) 3:

The overall image of the film Fig chamber by the method shown in PLD 2-1. Fig of the film is actually on the left rear side of the main chamber 1. The front of the load lock chamber, ready for the role of the film is actually put into and out of the target and the single crystal substrate. For 10 - 9 Torr as the main chamber in a vacuum state, and is not directly in the main chamber, such as the target, the load lockYou can keep the vacuum degree of the main chamber. Orange box on the right, the oscillation of the excimer laser in the optical path of the optical frame through the main chamber is irradiated on the target. In the following, the film to talk more with the state of the main chamber.